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Development of Carbon Rich Spin-on Sidewall Material
by
Yaguchi, H.
,
Hsu, Dennis Shu-Hao
,
Maruyama, D.
,
Sakaida, Y.
,
Sassa, S.
,
Sakamoto, R.
,
Wang, Walter
,
Huang, Chun-Yen
,
Wu, Wen-Bin
,
Shih, Chiang-Lin
,
Ho, Bang-Ching
Published in
Journal of Photopolymer Science and Technology
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Journal Of Photopolymer Science And Technology
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Subjects
Amplifiers
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Carbon
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Chemical Vapor Deposition
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Crosslinking
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Cvd Sidewall Process
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Dissolution
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Etching
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Patterning
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Photoresists
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Physical Sciences
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Polymer Science
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Resists
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Sadpt
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Science & Technology
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Self Aligned Double Patterning Technologies
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Sidewall Width
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Sos Pattern
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Spin-On Sidewall Material
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Free Full-Text Journals In Chemistry
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