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    Defect and strain in hydrogen and helium coimplanted single-crystal silicon

    Defect and strain in hydrogen and helium coimplanted single-crystal silicon by Duo, Xinzhong, Liu, Weili, Xing, Su, Zhang, Miao, Fu, Xiaorong, Lin, Chenglu, Hu, Pegang, Wang, S X, Wang, L M

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