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Extending displacements of comb drive actuators by adding secondary comb electrodes
by
Hou, Max Ti-Kuang
,
Huang, Gordon Kou-Wei
,
Huang, Jing-Yi
,
Liao, Ke-Min
,
Chen, Rongshun
,
Yeh, Jer-Liang Andrew
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Journal of micromechanics and microengineering
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Institute Of Physics:jisc Collections:iop Publishing Journal Archive 1874-1998 (Access Period 2020 To 2024)
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