Search Results - Hui, Tang Ern

  • Showing 1 - 1 results of 1
Refine Results
  1. 1
    Development of plasma etching process for sub-50 nm TaN gate

    Development of plasma etching process for sub-50 nm TaN gate by Bliznetsov, Vladimir, Kumar, Rakesh, Bera, Lakshmi Kanta, Yip, Loh Wei, Du, Anyan, Hui, Tang Ern

    Published in Thin solid films
    Get full text
    Items that this one cites
    Items that cite this one
    Article
    Save to List
    Saved in:

Search Tools: