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    Energy-enhanced deposition of copper thin films by bipolar high power impulse magnetron sputtering

    Energy-enhanced deposition of copper thin films by bipolar high power impulse magnetron sputtering by Velicu, Ioana-Laura, Ianoş, Gabriela-Theodora, Porosnicu, Corneliu, Mihăilă, Ilarion, Burducea, Ion, Velea, Alin, Cristea, Daniel, Munteanu, Daniel, Tiron, Vasile

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