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Low-pressure CVD grown Si-doped β-Ga2O3 films with promising electron mobilities and high growth rates
by
Khan, Saleh Ahmed
,
Ibreljic, Ahmed
,
Margiotta, Stephen
,
Bhuiyan, A. F. M. Anhar Uddin
Published in
Applied physics letters
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LPCVD Grown Si-Doped \(\beta\)-Ga\(_2\)O\(_3\) Films with Promising Electron Mobilities
by
Saleh Ahmed Khan
,
Ibreljic, Ahmed
,
Margiotta, Stephen
,
A F M Anhar Uddin Bhuiyan
Published in
arXiv.org
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Applied Physics Letters
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Chlorine
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Controllability
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Low Temperature
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