Application of HfSiON to Deep-Trench Capacitors of Sub-45-nm-Node Embedded Dynamic Random-Access Memory by Ando, Takashi, Sato, Naoyuki, Hiyama, Susumu, Hirano, Tomoyuki, Nagaoka, Kojiro, Abe, Hitoshi, Okuyama, Atsushi, Ugajin, Hajime, Tai, Kaori, Fujita, Shigeru, Watanabe, Koji, Katsumata, Ryota, Idebuchi, Jun, Suzuki, Takashi, Hasegawa, Toshiaki, Iwamoto, Hayato, Kadomura, Shingo

Get full text