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Middle of Line: Challenges and Their Resolution for FinFET Technology
by
Mishra, Shiv Kumar
,
Geiss, Erik
,
Kumar, Aditya
,
Malinowski, Arkadiusz
,
Zhi, Gao Wen
,
Lin, Wenhe
,
Indajang, Bangun
,
Slisher, Dustin
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Annealing
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Middle Of Line
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Replacement Metal Gate
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