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Phase Modulation Microscope MIM-2.1 for Measurements of Surface Microrelief. Results of Measurements
by
Andreev, V. A.
,
Indukaev, K. V.
,
Ioselev, O. K.
,
Legkii, A. I.
,
Lazarev, G. L.
,
Orlov, D. A.
Published in
Journal of Russian laser research
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Journal Of Russian Laser Research
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Optics
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Phase Modulation Microscopy
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Resolution
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Surface Microrelief
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