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Dissolution of donor-vacancy clusters in heavily doped n-type germanium
by
Prucnal, Slawomir
,
Liedke, Maciej O
,
Wang, Xiaoshuang
,
Butterling, Maik
,
Posselt, Matthias
,
Knoch, Joachim
,
Windgassen, Horst
,
Hirschmann, Eric
,
Berencén, Yonder
,
Rebohle, Lars
,
Wang, Mao
,
Napoltani, Enrico
,
Frigerio, Jacopo
,
Ballabio, Andrea
,
Isella, Giovani
,
Hübner, René
,
Wagner, Andreas
,
Bracht, Hartmut
,
Helm, Manfred
,
Zhou, Shengqiang
Published in
New journal of physics
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Dissolution of donor-vacancy clusters in heavily doped n-type germanium
by
Prucnal, Slawomir
,
Liedke, Maciej O
,
Wang, Xiaoshuang
,
Butterling, Maik
,
Posselt, Matthias
,
Knoch, Joachim
,
Windgassen, Horst
,
Hirschmann, Eric
,
Berencén, Yonder
,
Rebohle, Lars
,
Wang, Mao
,
Napoltani, Enrico
,
Frigerio, Jacopo
,
Ballabio, Andrea
,
Isella, Giovani
,
Hübner, René
,
Wagner, Andreas
,
Bracht, Hartmut
,
Helm, Manfred
,
Zhou, Shengqiang
Published in
arXiv.org
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New Journal Of Physics
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Subjects
Carrier Density
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Clusters
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Coordination Compounds
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Dissolution
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Electrical Measurement
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Flash Lamps
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Germanium
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Phosphorus
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Positron Annihilation
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Secondary Ion Mass Spectrometry
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Vacancies
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Annealing
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Deactivation
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Doping
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Flash Lamp Annealing
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Mass Spectrometry
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Metal Oxide Semiconductors
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Metal Oxides
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Molecular Beam Epitaxy
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Physical Sciences
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