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Ultrathin Al2O3 and HfO2 gate dielectrics on surface-nitrided Ge
by
JER-HUEIH CHEN, James
,
BOJARCZUK, Nestor A
,
HUILING SHANG
,
COPEL, Matthew
,
HANNON, James B
,
KARASINSKI, Joseph
,
PREISLER, Edward
,
BANERJEE, Sanjay K
,
GUHA, Supratik
Published in
IEEE transactions on electron devices
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Ultrathin Al/sub 2/O/sub 3/ and HfO/sub 2/ gate dielectrics on surface-nitrided Ge
by
James Jer-Hueih Chen
,
Bojarezuk, N.A.
,
Huiling Shang
,
Copel, M.
,
Hannon, J.B.
,
Karasinski, J.
,
Preisler, E.
,
Banerjee, S.K.
,
Guha, S.
Published in
IEEE transactions on electron devices
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Ultrathin Al(2)O(3) and HfO(2) gate dielectrics on surface-nitrided Ge
by
Chen, James Jer-Hueih
,
Bojarezuk, N A
,
Shang, Huiling
,
Copel, M
,
Hannon, J B
,
Karasinski, J
,
Preisler, E
,
Banerjee, S K
,
Guha, S
Published in
IEEE transactions on electron devices
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Ultrathin Al sub(2)O sub(3) and HfO sub(2) gate dielectrics on surface-nitrided Ge
by
Jer-Hueih Chen, James
,
Bojarezuk, NA Jr
,
Shang, Huiling
,
Copel, M
,
Hannon, J B
,
Karasinski, J
,
Preisler, E
,
Banerjee, S K
,
Guha, S
Published in
IEEE transactions on electron devices
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Ieee Transactions On Electron Devices
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