Search Results - Jackett-Murphy, S.

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    Quality of SOI film after surface smoothing with hydrogen annealing, touch-polishing

    Quality of SOI film after surface smoothing with hydrogen annealing, touch-polishing by Maszara, W.P., Gondran, C.F.H., Jackett-Murphy, S., Vasudev, P.K., Iyer, S.S., Anc, M.J.

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    Low dose SIMOX and impact of ITOX process on quality of SOI film

    Low dose SIMOX and impact of ITOX process on quality of SOI film by Maszara, W.P., Bennett, J., Boden, T., Dockerty, R., Gondran, C.F.H., Jackett-Murphy, S., Vasudev, P.K., Anc, M.J., Hovel, H.

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