Search Results - Jacobs, Heiko Otto

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    Ruthenium and Rhodium Vertical Interconnect Formation Using Gas Phase Electrodeposition

    Ruthenium and Rhodium Vertical Interconnect Formation Using Gas Phase Electrodeposition by Hossain, Mohammad Mobassar, Schlag, Leslie, Wolz, Benedikt, Ziegler, Mario, Nahrstedt, Helene, Reichel, Helene, Pezoldt, Jorg, Jacobs, Heiko Otto

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    Self-Aligning Ruthenium Interconnects

    Self-Aligning Ruthenium Interconnects by Schlag, Leslie, Grau, Richard, Hossain, Mobassar, Nahrstedt, Helene, Isaac, Nishchay Angel, Reiprich, Johannes, Pezoldt, Jorg, Jacobs, Heiko Otto

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