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Search Results - Jayez, David
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Wafer backside cleaning for defect reduction and litho hot spots mitigation: DI: Defect inspection and reduction
by
Balu, Elango
,
Tseng, Wei-Tsu
,
Jayez, David
,
Mody, Jay
,
Donegan, Keith
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Metrology manufacturing control factors: A holistic approach for supporting 14nm and 7nm
by
Jayez, David
,
Vaid, Alok
,
Solecky, Eric
,
Lenahan, Michael
,
Dixit, Dhairya
,
Largo, Charles
,
Vakas, Georgios
,
Seipp, Steve
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Manufacturing excellence using multi-platform ellipsometry thickness measurement fleet on advanced nodes
by
Lenahan, Michael
,
Vaid, Alok
,
Mahendrakar, Sridhar
,
Seipp, Steven
,
Jayez, David
,
Yueh, Alice
,
Saxena, Shweta
,
Solecky, Eric
,
Gizzi, Samuel
,
Heller, Amir
,
Zhang, Tianhao
,
Song, Da
,
Yoon, Nam Hee
,
Camp, Janay
,
Venkataraman, Kartik
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Conference Proceedings
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Engineering
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Engineering, Electrical & Electronic
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Metrology
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Science & Technology
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Technology
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Backside Defects
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Brushes
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Chemicals
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Control Systems
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Ellipsometry
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Engineering, Manufacturing
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Failure Modes
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Fault Detection
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Fleet Matching
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Fmp
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Hardware
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Health
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Hot Spots
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Ieee Electronic Library (Iel) Conference Proceedings
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Ieee Xplore All Conference Series
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