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Application of cubic spline models in electron-beam lithography
by
Jedidi, Nader
,
Tortai, Jean-Hervé
,
Figueiro, Thiago
,
Schiavone, Patrick
Published in
Journal of vacuum science and technology. B, Nanotechnology & microelectronics
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Feedforward Run-to-Run Control for Reduced Parametric Transistor Variation in CMOS Logic 0.13 [Formula Omitted] Technology
by
Jedidi, Nader
,
Sallagoity, Pascal
,
Roussy, Agnés
,
Dauzere-Peres, Stéphane
Published in
IEEE transactions on semiconductor manufacturing
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Feedforward Run-to-Run Control for Reduced Parametric Transistor Variation in CMOS Logic 0.13 μm Technology
by
JEDIDI, Nader
,
SALLAGOITY, Pascal
,
ROUSSY, Agnes
,
DAUZERE-PERES, Stéphane
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IEEE transactions on semiconductor manufacturing
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Feedforward Run-to-Run Control for Reduced Parametric Transistor Variation in CMOS Logic 0.13 \mu Technology
by
Jedidi, Nader
,
Sallagoity, Pascal
,
Roussy, Agnés
,
Dauzere-Peres, Stéphane
Published in
IEEE transactions on semiconductor manufacturing
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Feed-forward run-to-run control for reduced parametric transistor variation in CMOS logic 0.13μm technology
by
Jedidi, N.
,
Sallagoity, P.
,
Roussy, A.
,
Dauzere-Peres, S.
,
Pinaton, J.
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Ultrathin titanium passive devices fabrication
by
Ecoffey, S.
,
Morissette, J-F
,
Jedidi, N.
,
Guilmain, M.
,
Nauenheim, C.
,
Drouin, D.
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