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Leakage Current Reduction Mechanism of Oxide--Nitride--Oxide Inter-Poly Dielectrics through the Post Plasma Oxidation Treatment
by
Lee, Woong
,
Jee, Jeonggeun
,
Yoo, Dae-Han
,
Lee, Eun-Young
,
Bok, Jinkwon
,
Hyung, Younwoo
,
Kim, Seoksik
,
Kang, Chang-Jin
,
Moon, Joo-Tae
,
Roh, Yonghan
Published in
Japanese Journal of Applied Physics
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Leakage Current Reduction Mechanism of Oxide–Nitride–Oxide Inter-Poly Dielectrics through the Post Plasma Oxidation Treatment
by
Lee, Woong
,
Jee, Jeonggeun
,
Yoo, Dae-Han
,
Lee, Eun-Young
,
Bok, Jinkwon
,
Hyung, Younwoo
,
Kim, Seoksik
,
Kang, Chang-Jin
,
Moon, Joo-Tae
,
Roh, Yonghan
Published in
Japanese Journal of Applied Physics
Get full text
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Items that cite this one
Article
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Japanese Journal Of Applied Physics
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Japanese Journal Of Applied Physics : Jjap
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Jpn J Appl Phys
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General Engineering
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Institute Of Physics Iopscience Extra
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