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    Improvement of the performance of ZnO TFTs by low-temperature supercritical fluid technology treatment

    Improvement of the performance of ZnO TFTs by low-temperature supercritical fluid technology treatment by Chen, Min-Chen, Chang, Ting-Chang, Huang, Sheng-Yao, Chang, Kuan-Chang, Huang, Hui-Chun, Chen, Shih-Ching, Lu, Jin, Gan, Der-Shin, Ho, New-Jin, Young, Tai-Fa, Jhang, Geng-Wei, Tai, Ya-Hsiang

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