Search Results - John-Kadaksham, Arun

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  1. 1
    Cleaning Challenges of EUV Mask Substrates, Blanks, and Patterned Mask

    Cleaning Challenges of EUV Mask Substrates, Blanks, and Patterned Mask by Rastegar, Abbas, House, Matthew, John Kadaksham, Arun

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  2. 2
    Chemical Mechanical Polishing for Extreme Ultraviolet Lithography Mask Substrates

    Chemical Mechanical Polishing for Extreme Ultraviolet Lithography Mask Substrates by Amanapu, Hari Prasad, Lagudu, Uma Rames, Teki, Ranganath, John-Kadaksham, Arun, Babu, Suryadevara V.

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  3. 3
    Simulation study of cleaning induced extreme ultraviolet reflectivity loss mechanisms on mask blanks

    Simulation study of cleaning induced extreme ultraviolet reflectivity loss mechanisms on mask blanks by Upadhyaya, Mihir, Denbeaux, Gregory, Kadaksham, Arun John, Jindal, Vibhu, Jones, Jenah Harris, Lee, Byunghoon, Goodwin, Frank

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  4. 4
    Trapping heavy metals by using calcium hydroxyapatite and dielectrophoresis

    Trapping heavy metals by using calcium hydroxyapatite and dielectrophoresis by Batton, John, Kadaksham, Arun John, Nzihou, Ange, Singh, Pushpendra, Aubry, Nadine

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