Search Results - Juang, Y.Z.

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  1. 1
    Reactive ion etching of Si/SiGe in CF 4/Ar and Cl 2/BCl 3/Ar discharges

    Reactive ion etching of Si/SiGe in CF 4/Ar and Cl 2/BCl 3/Ar discharges by Chang, S.J., Juang, Y.Z., Nayak, D.K., Shiraki, Y.

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  2. 2
    Reactive ion etching of Si/SiGe in CF4/Ar and Cl2/BCl3/Ar discharges

    Reactive ion etching of Si/SiGe in CF4/Ar and Cl2/BCl3/Ar discharges by CHANG, S. J, JUANG, Y. Z, NAYAK, D. K, SHIRAKI, Y

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  3. 3
    A study of selective and nonselective reactive ion etching of GaAs/AlGaAs materials

    A study of selective and nonselective reactive ion etching of GaAs/AlGaAs materials by Su, Y.K., Juang, Y.Z., Shei, S.C., Fang, B.C.

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