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Evaluation of Anode Water Electrolyzed with Anion Exchange Membrane for Cleaning EUV Semiconductor
by
Kim, Hyungwon
,
Lim, Sungmin
,
Ryoo, Kunkul
,
Choi, Insik
,
Choi, Byungsun
,
Kim, Jaeyoung
,
Jung, Younwon
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ECS Advances
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Evolutional Wet Cleaning in the Extreme Ultraviolet Era
by
Ryoo, Kunkul
,
Jung, Younwon
,
Choi, Insik
,
Lee, Jaeyong
,
Choi, Byungsun
Published in
ECS journal of solid state science and technology
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Erratum: Evolutional Wet Cleaning in the Extreme Ultraviolet Era [ECS J. Solid State Sci. Technol., 8, P303 (2019)]
by
Ryoo, Kunkul
,
Jung, Younwon
,
Choi, Insik
,
Lee, Jaeyong
,
Choi, Byungsun
Published in
ECS journal of solid state science and technology
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Wet Cleaning by Using Amphoteric Electrolyzed Water for Mask Cleaning
by
Ryoo, Kunkul
,
Jung, Younwon
,
Choi, Insik
,
Kim, Hyungwon
,
Lee, Jaeyong
,
Choi, Byungsun
Published in
ECS transactions
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