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Integrated Stress Sensors for Humidity Performance Drift Analysis and Compensation in Inertial Measurement Units
by
Jurgschat, Clemens
,
Roewer, Falk
,
Toth, Imre
,
Ohms, Torsten
,
Zimmermann, Andre
Published in
Journal of microelectromechanical systems
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Experimental Investigation of Moisture Induced Offset Drifts on Plastic Packaged MEMS Sensor Devices
by
Jurgschat, Clemens
,
Scheben, Rolf
,
Toth, Imre
,
Ohms, Torsten
,
Kohn, Oliver
,
Zimmermann, Andre
Published in
Journal of microelectromechanical systems
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50.2: Invited Paper: Characterization of Co‐Fabricated Silicon TFT and MEMS Shutter Display
by
Fruehauf, Norbert
,
Al Nusayer, Sheikh Abdullah
,
Schalberger, Patrick
,
Baur, Holger
,
Jurgschat, Clemens
Published in
SID International Symposium Digest of technical papers
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Journal Of Microelectromechanical Systems
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Sid International Symposium Digest Of Technical Papers
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Drift
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Engineering
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Engineering, Electrical & Electronic
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Humidity
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Instruments & Instrumentation
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Microelectromechanical Systems
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Moisture
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Moisture Effects
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Nanoscience & Nanotechnology
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Physical Sciences
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Active Matrix
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Circuits
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Compensation
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