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Search Results - KAGUCHI, Naoto
Search Results - KAGUCHI, Naoto
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Species responsible for Si–H2 bond formation in a-Si:H films deposited using silane high frequency discharges
by
Shiratani, Masaharu
,
Koga, Kazunori
,
Kaguchi, Naoto
,
Bando, Kouki
,
Watanabe, Yukio
Published in
Thin solid films
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Cluster-eliminating filter for depositing cluster-free a -Si:H films by plasma chemical vapor deposition
by
Koga, Kazunori
,
Kaguchi, Naoto
,
Bando, Kouki
,
Shiratani, Masaharu
,
Watanabe, Yukio
Published in
Review of scientific instruments
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Which is harder SOA test for SiC MOSFET to do Unclamped Inductive Switching (UIS) or Unloaded Short Circuit mode Switching (USCS)? Does UIS play a role of USCS?
by
Hasegawa, Kazuhiko
,
Taguchi, Kensuke
,
Kagawa, Yasuhiro
,
Suekawa, Eisuke
,
Kaguchi, Naoto
,
Ata, Yasuo
,
Haruguchi, Hideki
,
Nakashima, Yu
,
Minato, Tadaharu
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Correlation between volume fraction of clusters incorporated into a-Si:H films and hydrogen content associated with Si–H2 bonds in the films
by
Koga, Kazunori
,
Kaguchi, Naoto
,
Shiratani, Masaharu
,
Watanabe, Yukio
Published in
Journal of vacuum science & technology. A, Vacuum, surfaces, and films
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Correlation between volume fraction of clusters incorporated into a-Si:H films and hydrogen content associated with Si–H 2 bonds in the films
by
Koga, Kazunori
,
Kaguchi, Naoto
,
Shiratani, Masaharu
,
Watanabe, Yukio
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Conference Proceeding
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Species responsible for Si–H 2 bond formation in a-Si:H films deposited using silane high frequency discharges
by
Shiratani, Masaharu
,
Koga, Kazunori
,
Kaguchi, Naoto
,
Bando, Kouki
,
Watanabe, Yukio
Published in
Thin solid films
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Article
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Cluster-eliminating filter for depositing cluster-free a -Si:H filmsby plasma chemical vapor deposition
by
Koga, Kazunori
,
Kaguchi, Naoto
,
Bando, Kouki
,
Shiratani, Masaharu
,
Watanabe, Yukio
Published in
Review of scientific instruments
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Species responsible for Si-H2 bond formation in a-Si:H films deposited using silane high frequency discharges
by
SHIRATANI, Masaharu
,
KOGA, Kazunori
,
KAGUCHI, Naoto
,
BANDO, Kouki
,
WATANABE, Yukio
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Conference Proceeding
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