Microstructure and reliability of copper interconnects by Changsup Ryu, Kee-Won Kwon, Loke, A.L.S., Haebum Lee, Nogami, T., Dubin, V.M., Kavari, R.A., Ray, G.W., Wong, S.S.

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Demonstration of scaled (⩾0.12 μm2) Pb(Zr,Ti)O3 capacitors on W plugs with Al interconnect by Summerfelt, S. R., Moise, T. S., Xing, G., Colombo, L., Sakoda, T., Gilbert, S. R., Loke, A. L. S., Ma, S., Wills, L. A., Kavari, R., Hsu, T., Amano, J., Johnson, S. T., Vestcyk, D. J., Russell, M. W., Bilodeau, S. M., van Buskirk, P.

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Composite metal etching for submicron integrated circuits by Riley, P.E., Ben-tzur, M., Kavari, R.

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An evaluation of the HotOzone/sup TM/ process: a new post etch resist and residue removal process by Shawming Ma, Parker, R., Kavari, R., Leal, I., Boyers, D.G., Cremer, J.T.

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Process integration of a direct-on-metal, non-etchback, /spl kappa/=2.5 spin-on polymer for the 0.18 /spl mu/m CMOS technology node by Sum, J.C., Ray, G.W., Ma, S., Kavari, R., MacInnes, L.M., Treadwell, C.A., Dunne, J., Hacker, N.P., Figge, L.K., Hendricks, N.

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Process integration of a direct-on-metal, non-etchback, κ= 2.5 spin-on polymer for the 0.18 μm CMOS technology node by SUM, J. C, RAY, G. W, MA, S, KAVARI, R, MACINNES, L. M, TREADWELL, C. A, DUNNE, J, HACKER, N. P, FIGGE, L. K, HENDRICKS, N

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Electrical properties of submicron (/spl ges/0.13 /spl mu/m/sup 2/) Ir/PZT/Ir capacitors formed on W plugs by Moise, T.S., Summerfelt, S.R., Xing, G., Colombo, L., Sakoda, T., Gilbert, S.R., Loke, A., Ma, S., Kavari, R., Wills, L.A., Hsu, T., Amano, J., Johnston, S.T., Vestyck, D.J., Russell, M.W., Bilodeau, S.M.

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Identification of an immunodominant drug efflux pump in Burkholderia cepacia by Wigfield, S. M., Rigg, G. P., Kavari, M., Webb, A. K., Matthews, R. C., Burnie, J. P.

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HYDROGEN-ROBUST SUBMICRON IrOx/Pb(Zr, Ti)O3/Ir CAPACITORS FOR EMBEDDED FERROELECTRIC MEMORY by Sakoda, T, Moise, T S, Summerfelt, S R, Colombo, L, Xing, G, Gilbert, S R

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International multicenter tool to predict the risk of four or more tumor-positive axillary lymph nodes in breast cancer patients with sentinel node macrometastases by Meretoja, Tuomo J., Audisio, R. A., Heikkilä, P. S., Bori, R., Sejben, I., Regitnig, P., Luschin-Ebengreuth, G., Zgajnar, J., Perhavec, A., Gazic, B., Lázár, G., Takács, T., Kővári, B., Saidan, Z. A., Nadeem, R. M., Castellano, I., Sapino, A., Bianchi, S., Vezzosi, V., Barranger, E., Lousquy, R., Arisio, R., Foschini, M. P., Imoto, S., Kamma, H., Tvedskov, T. F., Jensen, M.-B., Cserni, G., Leidenius, M. H. K.

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Hydrogen-Robust Submicron IrO x /Pb(Zr, Ti)O 3 /Ir Capacitors for Embedded Ferroelectric Memory by Sakoda, Tomoyuki, Moise, Theodore S., Summerfelt, Scott R., Colombo, Luigi, Xing, Guoqiang, Gilbert, Stephen R., Loke, Alvin L. S., Ma, Shawming, Kavari, Rahim, Wills, Laura A., Amano, Jun

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