Search Results - Kameda, Asaki

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    Precise measurement of the temperature of a silicon wafer by an optical-interference contactless thermometer during rapid plasma processing

    Precise measurement of the temperature of a silicon wafer by an optical-interference contactless thermometer during rapid plasma processing by Kameda, Asaki, Mizukawa, Yuri, Hanafusa, Hiroaki, Higashi, Seiichiro

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    In situ monitoring to visualize temperature distribution in molten silicon region formed under atmospheric pressure thermal plasma jet irradiation

    In situ monitoring to visualize temperature distribution in molten silicon region formed under atmospheric pressure thermal plasma jet irradiation by Mizukawa, Yuri, Kameda, Asaki, Hanafusa, Hiroaki, Higashi, Seiichiro

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