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Formation of CxNy films by high dose nitrogen implantation in the layered structures
by
Komarov, A.F.
,
Komarov, F.F.
,
Mironov, A.M.
,
Nikiforenko, N.N.
,
Mączka, D.
,
Kamyshan, A.F.
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Vacuum
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Formation of C N films by high dose nitrogen implantation in the layered structures
by
Komarov, A.F.
,
Komarov, F.F.
,
Mironov, A.M.
,
Nikiforenko, N.N.
,
Mączka, D.
,
Kamyshan, A.F.
Published in
Vacuum
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Vacuum
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Condensed Matter: Structure, Mechanical And Thermal Properties
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Exact Sciences And Technology
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High Dose Ion Implantation
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Low-Dimensional Structures : Structure, And Nonelectronic Properties
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Materials Science
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Materials Science, Multidisciplinary
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Monte-Carlo Simulation
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Physical Sciences
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Physics
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Physics, Applied
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Science & Technology
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Sputtering
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Surfaces And Interfaces; Thin Films And Whiskers
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Backfile Package - Physics General (Legacy) [Ypa]
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