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Thermal Stability of Pure a-Si Films Prepared by rf-Bias Sputtering
by
Suzuki, Masakuni
,
Suzuki, Makoto
,
Kanada, Matahiko
,
Kakimoto, Yoshio
Published in
Japanese Journal of Applied Physics
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Amorphous Silicon Films Prepared by rf-Bias Sputtering
by
Suzuki, Masakuni
,
Suzuki, Makoto
,
Kanada, Matahiko
,
Shimizu, Shin
,
Takayama, Yukiyoshi
,
Yamaura, Tadashi
Published in
Japanese Journal of Applied Physics
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Japanese Journal Of Applied Physics
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