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Search Results - Kanakamedala, Senaka
Search Results - Kanakamedala, Senaka
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A simple polymer based electrochemical transistor for micromolar glucose sensing
by
Kanakamedala, Senaka K.
,
Alshakhouri, Haidar T.
,
Agarwal, Mangilal
,
DeCoster, Mark A.
Published in
Sensors and actuators. B, Chemical
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Inherent area selective deposition of silicon dioxide in multilayer 3D SiOx–SiNx stacks
by
Sondhi, Kartik
,
Ross, Stephen
,
Nag, Joyeeta
,
Guo, X. C.
,
Zhao, Dexin
,
Rajashekhar, Adarsh
,
Kanakamedala, Senaka
Published in
Journal of vacuum science & technology. A, Vacuum, surfaces, and films
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Inherent area selective deposition of silicon dioxide in multilayer 3D SiO x –SiN x stacks
by
Sondhi, Kartik
,
Ross, Stephen
,
Nag, Joyeeta
,
Guo, X. C.
,
Zhao, Dexin
,
Rajashekhar, Adarsh
,
Kanakamedala, Senaka
Published in
Journal of vacuum science & technology. A, Vacuum, surfaces, and films
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Understanding 3D anisotropic reactive ion etching of oxide-metal stacks
by
Golani, Prafful
,
Tirukkonda, Roshan J.
,
Fancher, Aaron N.
,
Ross, Stephen R.
,
Kraman, Mark D.
,
Sharangpani, Rahul
,
Nag, Joyeeta
,
Sondhi, Kartik
,
Bogdanov, Alexei L.
,
Kanakamedala, Senaka K.
Published in
Journal of vacuum science and technology. B, Nanotechnology & microelectronics
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Hardmask engineering by mask encapsulation for enabling next generation reactive ion etch scaling
by
Tirukkonda, Roshan J.
,
Kraman, Mark D.
,
Sharangpani, Rahul
,
Sondhi, Kartik
,
Fancher, Aaron N.
,
Ross, Stephen R.
,
Nag, Joyeeta
,
Bogdanov, Alexei L.
,
Makala, Raghuveer S.
,
Kanakamedala, Senaka K.
Published in
Journal of vacuum science and technology. B, Nanotechnology & microelectronics
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Extending area selective deposition of ruthenium onto 3D SiO2-Si multilayer stacks
by
Sondhi, Kartik
,
Sharangpani, Rahul
,
Tirukkonda, Roshan
,
Nag, Joyeeta
,
Guo, Xing-Cai
,
Gribelyuk, Michael A.
,
Makala, Raghuveer S.
,
Kanakamedala, Senaka
Published in
Journal of vacuum science & technology. A, Vacuum, surfaces, and films
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Area selective deposition of ruthenium on 3D structures
by
Sondhi, Kartik
,
Sharangpani, Rahul
,
Said, Ramy Nashed Bassely
,
Nag, Joyeeta
,
Gribelyuk, Michael
,
Kanakamedala, Senaka
,
Makala, Raghuveer S.
Published in
Journal of vacuum science & technology. A, Vacuum, surfaces, and films
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