Search Results - Kappel, Joscha

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    Design process interactions in shallow trench isolation chemical mechanical planarization for layout diversification and design optimization

    Design process interactions in shallow trench isolation chemical mechanical planarization for layout diversification and design optimization by Guhl, Conrad, Bott, Sascha, Albayrak, I. Can, Weitzmann, Anne, Krause, Robert, Kappel, Joscha, Reinhold, Birgit, Wu, Nan, Zier, Michael, Schuring, Andreas, Ma, Hongwei, Huselitz, Rico, Uhlig, Benjamin, Wislicenus, Marcus

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