Probe measurements of magnetron discharge parameters by Karzin, V, Smirnov, V

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Substrate heating and cooling during magnetron sputtering of copper target by Shapovalov, Viktor I., Komlev, Andrey E., Bondarenko, Anastasia S., Baykov, Pavel B., Karzin, Vitaliy V.

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Simulation of heating of the target during high-power impulse magnetron sputtering by Karzin, V.V., Komlev, A.E., Karapets, K.I., Lebedev, N.K.

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Investigation of gas discharge features during HiPIMS using optical emission spectroscopy by Karzin, V V, Karapets, K I

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Investigation of the emission spectra of a high-power impulse gas discharge of a magnetron during reactive sputtering by Dohtarenko, D V, Karzin, V V, Antoshenko, D D, Muhangali, S M, Gnivush, I S, Saribekyan, A M

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Investigation of the influence of the parameters of a pulsed power source on the properties of a magnetron's high-power gas discharge by Borzykin, T S, Karzin, V V, Ivanov, D A, Lullin, Z G, Reznikov, R I

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Method of the coating thickness and transmittance control during the film deposition process by Uhov, A A, Komlev, A E, Gerasimov, V A, Karzin, V V, Kostrin, D K, Selivanov, L M, Simon, V A

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Spin-Wave Phase Shifters Utilizing Metal-Insulator Transition by Nikitin, Andrey A., Vitko, Vitalii V., Nikitin, Aleksei A., Ustinov, Alexey B., Karzin, Vitaliy V., Komlev, Andrey E., Kalinikos, Boris A., Lahderanta, Erkki

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Physicochemical model for reactive sputtering of hot target by Shapovalov, Viktor I., Karzin, Vitaliy V., Bondarenko, Anastasia S.

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X-ray phase analysis of copper oxides films obtained by DC reactive magnetron sputtering by Lapshin, A. E., Karzin, V. V., Shapovalov, V. I., Baikov, P. B.

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