Showing
1 - 10
results of
10
Skip to content
VuFind
Log in
Library Catalogue Plus
Library
Subject guides
Databases
Referencing
Catalogue
Articles Plus
Keyword
Title
Author
Subject
Find
Advanced Search
Search Results - Kasica, R. J.
Search Results - Kasica, R. J.
Showing
1 - 10
results of
10
Refine Results
Sort
Relevance
Date Descending
Author
Title
1
Loading…
Monte Carlo study of high performance resists for SCALPEL nanolithography
by
Ocola, L.E.
,
Li, W-Y.
,
Kasica, R.J.
,
Blakey, M.I.
,
Orphanos, P.A.
,
Waskiewicz, W.K.
,
Novembre, A.E.
,
Sato, M.
Published in
Microelectronic engineering
Get full text
Items that this one cites
Items that cite this one
Article
Save to List
Saved in:
2
Loading…
Pattern processing results and characteristics for SCALPEL masks
by
Novembre, A.E.
,
Blakey, M.I.
,
Farrow, R.C.
,
Kasica, R.J.
,
Knurek, C.S.
,
Liddle, J.A.
,
Peabody, M.L.
Published in
Microelectronic engineering
Get full text
Article
Save to List
Saved in:
3
Loading…
Image Formation in Electron Projection and E-beam Direct Write Lithography Resists
by
Ocola, L.E.
,
Blakey, M.I.
,
Orphanos, P.A.
,
Li, W.-Y.
,
Kasica, R. J.
,
Novembre, A. E.
Published in
Journal of Photopolymer Science and Technology
Get full text
Items that cite this one
Article
Save to List
Saved in:
4
Loading…
The enthalpy of formation of thin film titanium disilicide
by
Kasica, R. J.
,
Cotts, E. J.
Published in
Journal of applied physics
Get full text
Items that this one cites
Items that cite this one
Article
Save to List
Saved in:
5
Loading…
Initial lithography results from the digital electrostatic e-beam array lithography concept
by
Baylor, L. R.
,
Gardner, W. L.
,
Yang, X.
,
Kasica, R. J.
,
Guillorn, M. A.
,
Blalock, B.
,
Cui, H.
,
Hensley, D. K.
,
Islam, S.
,
Lowndes, D. H.
,
Melechko, A. V.
,
Merkulov, V. I.
,
Joy, D. C.
,
Rack, P. D.
,
Simpson, M. L.
,
Thomas, D. K.
Published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Get full text
Items that this one cites
Items that cite this one
Article
Save to List
Saved in:
6
Loading…
Pattern placement correction methodology for 200 mm SCALPEL masks
by
Ocola, L. E.
,
Farrow, R. C.
,
Kasica, R. J.
,
Caminos, C. G.
,
Rutberg, L.
,
Fullowan, R. F.
,
Teffeau, K.
,
Blakey, M. I.
,
Peabody, M. L.
,
Knurek, C. S.
,
Bogart, G. R.
,
Novembre, A. E.
,
Liddle, J. A.
,
Lercel, M.
,
Magg, C.
,
Collins, K.
,
Trybendis, M.
,
Cadwell, N.
,
Jeffer, R.
,
Dauksher, W. J.
,
Resnick, D. J.
,
Mancini, D.
,
Han, S. I.
,
Masnyj, Z.
,
Smith, K.
,
Mangat, P. J. S.
Published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Get full text
Items that this one cites
Article
Save to List
Saved in:
7
Loading…
New Strategies for Improvement and Implementation of the Digital Electrostatic e-beam Array Lithography (DEAL) Concept
by
Randolph, S.J.
,
Baylor, L.R.
,
Klein, K.L.
,
Gardner, W.L.
,
Kasica, R.J.
,
Guillorn, M.A.
,
Hensley, D.K.
,
Meyer, H.M.
,
Islam, S.
,
Rack, P.D.
,
Rucker, R.
,
Rahman, T.
,
Grundman, T.
,
Bigelow, T.
,
Eliza, S.A.
,
Vijayar, R.
,
Moore, J.A.
,
Simpson, M.L.
,
Ericson, M.N.
Request full text
Conference Proceeding
Save to List
Saved in:
8
Loading…
The Nanolithography Toolbox
by
Balram, Krishna C
,
Westly, Daron A
,
Davanço, Marcelo
,
Grutter, Karen E
,
Li, Qing
,
Michels, Thomas
,
Ray, Christopher H
,
Yu, Liya
,
Kasica, Richard J
,
Wallin, Christopher B
,
Gilbert, Ian J
,
Bryce, Brian A
,
Simelgor, Gregory
,
Topolancik, Juraj
,
Lobontiu, Nicolae
,
Liu, Yuxiang
,
Neuzil, Pavel
,
Svatos, Vojtech
,
Dill, Kristen A
,
Bertrand, Neal A
,
Metzler, Meredith G
,
Lopez, Gerald
,
Czaplewski, David A
,
Ocola, Leonidas
,
Srinivasan, Kartik A
,
Stavis, Samuel M
,
Aksyuk, Vladimir A
,
Liddle, J Alexander
,
Krylov, Slava
,
Ilic, B Robert
Published in
Journal of research of the National Institute of Standards and Technology
Get full text
Items that cite this one
Article
Save to List
Saved in:
9
Loading…
CMOS compatible alignment marks for the SCALPEL proof of lithography tool
by
Farrow, R.C.
,
Waskiewicz, W.K.
,
Kizilyalli, I.
,
Ocola, L.
,
Felker, J.
,
Biddick, C.
,
Gallatin, G.
,
Mkrtchyan, M.
,
Blakey, M.
,
Kraus, J.
,
Novembre, A.
,
Orphanos, P.
,
Peabody, M.
,
Kasica, R.
,
Kornblit, A.
,
Klemens, F.
Published in
Microelectronic engineering
Get full text
Items that this one cites
Items that cite this one
Article
Save to List
Saved in:
10
Loading…
Space-charge effects in projection electron-beam lithography: Results from the SCALPEL proof-of-lithography system
by
Liddle, J. A.
,
Blakey, M. I.
,
Bolan, K.
,
Farrow, R. C.
,
Gallatin, G. M.
,
Kasica, R.
,
Katsap, V.
,
Knurek, C. S.
,
Li, J.
,
Mkrtchyan, M.
,
Novembre, A. E.
,
Ocola, L.
,
Orphanos, P. A.
,
Peabody, M. L.
,
Stanton, S. T.
,
Teffeau, K.
,
Waskiewicz, W. K.
,
Munro, E.
Published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Get full text
Items that this one cites
Items that cite this one
Article
Save to List
Saved in:
Search Tools:
RSS Feed
Email Search
Save Search
Back
Refine Results
Page will reload when a filter is selected or excluded.
Limit To
Peer Reviewed
4 results
4
Full Text
10 results
10
Format
Articles
9 results
9
Conference Proceedings
1 results
1
Journal Title
Journal Of Vacuum Science & Technology B: Microelectronics And Nanometer Structures
3 results
3
Journal Of Vacuum Science & Technology. B, Microelectronics And Nanometer Structures Processing, Measurement And Phenomena
3 results
3
Microelectronic Engineering
3 results
3
Journal Of Applied Physics
1 results
1
Journal Of Photopolymer Science And Technology
1 results
1
Journal Of Research Of The National Institute Of Standards And Technology
1 results
1
Journal Of Vacuum Science & Technology B: Microelectronics And Nanometer Structures Processing, Measurement, And Phenomena
1 results
1
Journal Of Vacuum Science & Technology. B, Microelectronics Processing And Phenomena
1 results
1
more…
less…
Subjects
Physical Sciences
8 results
8
Physics
8 results
8
Physics, Applied
8 results
8
Science & Technology
8 results
8
Technology
7 results
7
Engineering
6 results
6
Engineering, Electrical & Electronic
6 results
6
Nanoscience & Nanotechnology
6 results
6
Science & Technology - Other Topics
6 results
6
Applied Sciences
3 results
3
Electronics
3 results
3
Exact Sciences And Technology
3 results
3
Microelectronic Fabrication
3 results
3
Optics
3 results
3
Semiconductor Electronics. Microelectronics. Optoelectronics. Solid State Devices
3 results
3
Condensed Matter Physics
2 results
2
Electrical And Electronic Engineering
2 results
2
Lithography
2 results
2
Nanoscale Devices
2 results
2
Apertures
1 results
1
more…
less…
Year of Publication
From:
To:
1400 : 2025
1400
2025
Source
American Institute Of Physics:jisc Collections:transitional Journals Agreement 2021-23 (Reading List)
4 results
4
Aip Digital Archive
4 results
4
Aip Journals (American Institute Of Physics)
4 results
4
Sciencedirect
3 results
3
Sciencedirect Freedom Collection
3 results
3
Sciencedirect Journals
3 results
3
Elsevier Sd Backfile Materials Science
3 results
3
Backfile Package - Physics General (Legacy) [Ypa]
3 results
3
Free Full-Text Journals In Chemistry
2 results
2
Ezb Free E-Journals
2 results
2
Ieee Electronic Library (Iel) Conference Proceedings
1 results
1
Ieee Xplore All Conference Series
1 results
1
Doaj Directory Of Open Access Journals
1 results
1
Ingentaconnect Journals
1 results
1
J-Stage
1 results
1
Publicly Available Content Database
1 results
1
U.s. Government Documents
1 results
1
Pubmed (Medline)
1 results
1
more…
less…