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Quantifying the Impact of Al Deposition Method on Underlying Al2O3/Si Interface Quality
by
Mack, Iris
,
Kawa Rosta
,
Quliyeva, Ulviyya
,
Ott, Jennifer
,
Pasanen, Toni P
,
Vähänissi, Ville
,
Zahra Sadat Jahanshah Rad
,
Juha-Pekka Lehtiö
,
Laukkanen, Pekka
,
Soldano, Caterina
,
Savin, Hele
Published in
Physica status solidi. A, Applications and materials science
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Quantifying the Impact of Al Deposition Method on Underlying Al 2 O 3 /Si Interface Quality
by
Mack, Iris
,
Rosta, Kawa
,
Quliyeva, Ulviyya
,
Ott, Jennifer
,
Pasanen, Toni P.
,
Vähänissi, Ville
,
Jahanshah Rad, Zahra Sadat
,
Lehtiö, Juha-Pekka
,
Laukkanen, Pekka
,
Soldano, Caterina
,
Savin, Hele
Published in
Physica status solidi. A, Applications and materials science
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Impact of doping and silicon substrate resistivity on the blistering of atomic-layer-deposited aluminium oxide
by
Ott, Jennifer
,
Pasanen, Toni P.
,
Gädda, Akiko
,
Garín, Moisés
,
Rosta, Kawa
,
Vähänissi, Ville
,
Savin, Hele
Published in
Applied surface science
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Decreasing Interface Defect Densities via Silicon Oxide Passivation at Temperatures Below 450 °C
by
Rad, Zahra Jahanshah
,
Lehtiö, Juha-Pekka
,
Mack, Iris
,
Rosta, Kawa
,
Chen, Kexun
,
Vähänissi, Ville
,
Punkkinen, Marko
,
Punkkinen, Risto
,
Hedman, Hannu-Pekka
,
Pavlov, Andrei
,
Kuzmin, Mikhail
,
Savin, Hele
,
Laukkanen, Pekka
,
Kokko, Kalevi
Published in
ACS applied materials & interfaces
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Physica Status Solidi. A, Applications And Materials Science
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Acs Applied Materials & Interfaces
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Applied Surface Science
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Materials Science
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Materials Science, Multidisciplinary
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Physical Sciences
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Physics
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Physics, Condensed Matter
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Silicon
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Ald
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Aluminium Oxide
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Aluminum Oxide
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Blistering
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Chemistry
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Chemistry, Physical
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Corona Oxide Characterization Of Semiconductors
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Defect Density
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Deposition
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Wiley Online Library Journals
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Wiley
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American Chemical Society:jisc Collections:american Chemical Society Read & Publish Agreement 2022-2024 (Reading List)
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Sciencedirect Journals
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Elsevier
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Backfile Package - Materials Science [Yms]
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Backfile Package - Physics General (Legacy) [Ypa]
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