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Search Results - Keeyoung Jun
Search Results - Keeyoung Jun
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EFFECT OF PARTIAL PRESSURE OF TiCl4 AND NH3 ON CHEMICAL VAPOR DEPOSITION TITANIUM NITRIDE (CVD-TiN) FILM Cl CONTENT AND ELECTRICAL RESISTIVITY
by
Jun, K
,
Shimogaki, Y
Published in
Jpn.J.Appl.Phys ,Part 2. Vol. 43, no. 4B, pp. L519-L521. 2004
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IMPROVEMENT OF TiN FLOW MODULATION CHEMICAL VAPOR DEPOSITION FROM TiCl4 AND NH3 BY INTRODUCING Ar PURGE TIME
by
Jun, K
,
Im, I-T
,
Shimogaki, Y
Published in
Jpn.J.Appl.Phys ,Part 1. Vol. 43, no. 4A, pp. 1619-1624. 2004
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Effect of Partial Pressure of TiCl 4 and NH 3 on Chemical Vapor Deposition Titanium Nitride (CVD-TiN) Film Cl Content and Electrical Resistivity
by
Jun, Keeyoung
,
Shimogaki, Yukihiro
Published in
Japanese Journal of Applied Physics
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Kinetics of TiN Chemical Vapor Deposition Process using TiCl 4 and NH 3 for ULSI Diffusion Barrier Applications: Relationship between Step Coverage and NH 3 Partial Pressure
by
Jun, Keeyoung
,
Egashira, Yasuyuki
,
Shimogaki, Yukihiro
Published in
Japanese Journal of Applied Physics
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Improvement of TiN Flow Modulation Chemical Vapor Deposition from TiCl 4 and NH 3 by Introducing Ar Purge Time
by
Jun, Keeyoung
,
Im, Ik-Tae
,
Shimogaki, Yukihiro
Published in
Japanese Journal of Applied Physics
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Electromigration Failure Mechanism and Lifetime Expectation for Bi-Modal Distribution in Cu/Low-k Interconnect
by
Young Jin Wee
,
Kim, A.T.
,
Jung Eun Lee
,
Jae Yeol Maeng
,
Woon Hyuk Choi
,
Seowoo Nam
,
Seungjin Lee
,
Kyoung Woo Lee
,
Jaehak Kim
,
Keeyoung Jun
,
Seung Man Choi
,
Jaeouk Choo
,
Jungshik Heo
,
Hong Jae Shin
,
Nae In Lee
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Conference Proceeding
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Unraveling and regulating superstructure domain dispersion in lithium-rich layered oxide cathodes for high stability and reversibility
by
Choi, Geunho
,
Chang, Uijin
,
Lee, Jeongjae
,
Park, Kwanghee
,
Kwon, Hyuksang
,
Lee, Hyosung
,
Kim, Yong-Il
,
Seo, Jong Hyeok
,
Park, Yoon-Cheol
,
Park, Inchul
,
Kim, Jieun
,
Lee, Seungmi
,
Choi, Jinuk
,
Yu, Byongyong
,
Song, Jun-Hyuk
,
Shin, Hosun
,
Baek, Seung-Wook
,
Lee, Sung Keun
,
Park, Hyeokjun
,
Jung, Keeyoung
Published in
Energy & environmental science
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Lithium-oxygen batteries with triplex Li-selective solid membranes
by
Choi, Youngbin
,
Jung, Keeyoung
,
Kim, Hyeong-Jun
,
Moon, Ji-Woong
,
Lee, Jong-Won
Published in
Chemical communications (Cambridge, England)
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Enhanced corrosion resistance of hypo-eutectic Al–1Mg– x Si alloys against molten sodium attack in high temperature sodium sulfur batteries
by
Jung, Keeyoung
,
Heo, Hoe-Jun
,
Lee, Ju-Hyeok
,
Park, Yoon-Cheol
,
Kang, Chung-Yun
Published in
Corrosion science
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Enhanced corrosion resistance of hypo-eutectic Al–1Mg–xSi alloys against molten sodium attack in high temperature sodium sulfur batteries
by
Jung, Keeyoung
,
Heo, Hoe-Jun
,
Lee, Ju-Hyeok
,
Park, Yoon-Cheol
,
Kang, Chung-Yun
Published in
Corrosion science
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Japanese Journal Of Applied Physics
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Jpn.j.appl.phys ,Part 1. Vol. 43, No. 4A, Pp. 1619-1624. 2004
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