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Diffusion and Distribution Studies of Photoacid Generators: Ion Beam Analysis in Lithography
by
Sundararajan, Narayan
,
Keimel, Christopher F.
,
Bhargava, Navin
,
Ober, Christopher K.
,
Opitz, Juliann
,
Allen, Robert D.
,
Barclay, George
,
Xu, Guangyu
Published in
Journal of Photopolymer Science and Technology
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Diffusion and Distribution Studies of Photoacid Generators. Ion Beam Analysis in Lithograpy
by
Sundararajan, Narayan
,
Keimel, Christopher F.
,
Bhargava, Navin
,
Ober, Christopher K.
,
Opitz, Juliann
,
Allen, Robert D.
,
Barclay, George
,
Xu, Guangyu
Published in
Journal of photopolymer science and technology
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Diffusion and Distribution Studies of Photoacid Generators
by
Sundararajan, Narayan
,
F. Keimel, Christopher
,
Bhargava, Navin
,
K. Ober, Christopher
,
Opitz, Juliann
,
D. Allen, Robert
,
Barclay, George
,
Xu, Guangyu
Published in
Journal of photopolymer science and technology
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Article
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Journal Of Photopolymer Science And Technology
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Diffusion
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Distribution
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Photoacid Generator
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Polarity
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Rutherford Backscattering
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Free Full-Text Journals In Chemistry
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J-Stage (Japan Science & Technology Information Aggregator, Electronic) - Open Access English Articles
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Ezb Electronic Journals Library
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