Showing
1 - 1
results of
1
Skip to content
VuFind
Log in
Library Catalogue Plus
Library
Subject guides
Databases
Referencing
Catalogue
Articles Plus
Keyword
Title
Author
Subject
Find
Advanced Search
Search Results - Keo Myoung Shin
Search Results - Keo Myoung Shin
Showing
1 - 1
results of
1
Refine Results
Sort
Relevance
Date Descending
Author
Title
1
Loading…
Titanium Silicide on Si:P With Precontact Amorphization Implantation Treatment: Contact Resistivity Approaching 1 \times 10^ Ohm-cm2
by
Hao Yu
,
Schaekers, Marc
,
Peter, Anthony
,
Pourtois, Geoffrey
,
Rosseel, Erik
,
Joon-Gon Lee
,
Woo-Bin Song
,
Keo Myoung Shin
,
Everaert, Jean-Luc
,
Soon Aik Chew
,
Demuynck, Steven
,
Daeyong Kim
,
Barla, Kathy
,
Mocuta, Anda
,
Horiguchi, Naoto
,
Thean, Aaron Voon-Yew
,
Collaert, Nadine
,
De Meyer, Kristin
Published in
IEEE transactions on electron devices
Get full text
Items that this one cites
Items that cite this one
Article
Save to List
Saved in:
Search Tools:
RSS Feed
Email Search
Save Search
Back
Refine Results
Page will reload when a filter is selected or excluded.
Limit To
Peer Reviewed
1 results
1
Full Text
1 results
1
Format
Articles
1 results
1
Journal Title
Ieee Transactions On Electron Devices
1 results
1
Subjects
Amorphization
1 results
1
Cmos
1 results
1
Cmos Technology
1 results
1
Conductivity
1 results
1
Contact Resistance
1 results
1
Contact Resistivity
1 results
1
Crystallites
1 results
1
Electric Contacts
1 results
1
Electrical Resistivity
1 results
1
Implantation
1 results
1
Intermetallic Compounds
1 results
1
Preamorphization Implantation
1 results
1
Resistance
1 results
1
Silicidation
1 results
1
Silicides
1 results
1
Silicon
1 results
1
Silicon Base Alloys
1 results
1
Titanium
1 results
1
Titanium Compounds
1 results
1
Titanium Silicide
1 results
1
Year of Publication
From:
To:
Source
Ieee Electronic Library (Iel) Journals
1 results
1
Ieee Xplore All Journals
1 results
1