Search Results - Keuhn, R.T.

  • Showing 1 - 2 results of 2
Refine Results
  1. 1
    Design and operation of a cluster-tool-based rapid thermal processing module

    Design and operation of a cluster-tool-based rapid thermal processing module by Bayoumi, A.M., Silvestre, C.L., Keuhn, R.T., Hauser, J.R.

    Request full text
    Conference Proceeding
    Save to List
    Saved in:
  2. 2
    Design, optimization, and characterization of a low temperature RPECVD MOS gate stack process

    Design, optimization, and characterization of a low temperature RPECVD MOS gate stack process by Parker, C.G., Silvestre, C., Watkins, M., Keuhn, R.T., Hauser, J.R.

    Request full text
    Conference Proceeding
    Save to List
    Saved in:

Search Tools: