Search Results - Keville, Bernard

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  1. 1
    Computational fluid dynamics modeling of a wafer etch temperature control system

    Computational fluid dynamics modeling of a wafer etch temperature control system by Oyama, Henrique, Nieman, Kip, Tran, Anh, Keville, Bernard, Wu, Yewei, Durand, Helen

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  2. 2
    Attenuation of wall disturbances in an electron cyclotron resonance oxygen–argon plasma using real time control

    Attenuation of wall disturbances in an electron cyclotron resonance oxygen–argon plasma using real time control by Keville, Bernard, Gaman, Cezar, Zhang, Yang, Holohan, Anthony M., Turner, Miles M., Daniels, Stephen

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  3. 3
    Real-time control of electron density in a capacitively coupled plasma

    Real-time control of electron density in a capacitively coupled plasma by Keville, Bernard, Zhang, Yang, Gaman, Cezar, Holohan, Anthony M., Daniels, Stephen, Turner, Miles M.

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