Search Results - Khudobin, S.A.

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    XPS investigation of the interaction between ECR-excited hydrogen and the native oxide of GaAs (100)

    XPS investigation of the interaction between ECR-excited hydrogen and the native oxide of GaAs (100) by Mikhailov, G.M., Bulkin, P.V., Khudobin, S.A., Chumakov, A.A., Shapoval, S.Yu

    Published in Vacuum
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    Compact ECR-source of ions and radicals for semiconductor surface treatment

    Compact ECR-source of ions and radicals for semiconductor surface treatment by Shapoval, S.Yu, Bulkin, P.V., Chumakov, A.A., Khudobin, S.A., Maximov, I., Mikhailov, G.M.

    Published in Vacuum
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