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Search Results - Kichikawa, Toshimichi
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Rapid heat treatment for spin coated ITO films by electron plasma annealing method
by
Wakagi, Masatoshi
,
Chahara, Ken-ichi
,
Onisawa, Ken-ichi
,
Kawakubo, Yukio
,
Kichikawa, Toshimichi
,
Satoh, Tadashi
,
Minemura, Tetsuroh
Published in
Thin solid films
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Thin Solid Films
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Annealing
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Condensed Matter: Electronic Structure, Electrical, Magnetic, And Optical Properties
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Cross-Disciplinary Physics: Materials Science; Rheology
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Electrical Properties Of Specific Thin Films
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Electron Plasma
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Exact Sciences And Technology
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Ito
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Liquid Phase Epitaxy; Deposition From Liquid Phases
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Materials Science
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Materials Science, Coatings & Films
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Materials Science, Multidisciplinary
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Methods Of Deposition Of Films And Coatings; Film Growth And Epitaxy
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Other Inorganic Semiconductors
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Physical Sciences
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Physics
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Physics Of Gases, Plasmas And Electric Discharges
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Physics Of Plasmas And Electric Discharges
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Physics, Applied
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Physics, Condensed Matter
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Plasma Applications
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Backfile Package - Materials Science [Yms]
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