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Effective work function tunability and interfacial reactions with underlying HfO2 layer of plasma-enhanced atomic layer deposited TaCxNy films
by
Park, Tae Joo
,
Kim, Jeong Hwan
,
Jang, Jae Hyuck
,
Hwang, Cheol Seong
,
Kim, Gee-Man
,
Choi, Kang Jun
,
Jeong, Jae Hak
Published in
Applied physics letters
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Effective work function tunability and interfacial reactions with underlying Hf O 2 layer of plasma-enhanced atomic layer deposited Ta C x N y films
by
Park, Tae Joo
,
Kim, Jeong Hwan
,
Jang, Jae Hyuck
,
Na, Kwang Duk
,
Hwang, Cheol Seong
,
Kim, Gee-Man
,
Choi, Kang Jun
,
Jeong, Jae Hak
Published in
Applied physics letters
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Improved electrical performances of plasma-enhanced atomic layer deposited TaCxNy films by adopting Ar∕H2 plasma
by
Park, Tae Joo
,
Kim, Jeong Hwan
,
Jang, Jae Hyuck
,
Hwang, Cheol Seong
,
Kim, Jong Hoon
,
Kim, Gee-Man
,
Choi, Jae Ho
,
Choi, Kang Joon
,
Jeong, Jae Hak
Published in
Applied physics letters
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Improved electrical performances of plasma-enhanced atomic layer deposited TaC x N y films by adopting Ar ∕ H 2 plasma
by
Park, Tae Joo
,
Kim, Jeong Hwan
,
Jang, Jae Hyuck
,
Na, Kwang Duk
,
Hwang, Cheol Seong
,
Kim, Jong Hoon
,
Kim, Gee-Man
,
Choi, Jae Ho
,
Choi, Kang Joon
,
Jeong, Jae Hak
Published in
Applied physics letters
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Improved electrical performances of plasma-enhanced atomic layer deposited TaC{sub x}N{sub y} films by adopting Ar/H{sub 2} plasma
by
Park, Tae Joo
,
Kim, Jeong Hwan
,
Jang, Jae Hyuck
,
Na, Kwang Duk
,
Hwang, Cheol Seong
,
Kim, Jong Hoon
,
Kim, Gee-Man
,
Choi, Jae Ho
,
Choi, Kang Joon
,
Jeong, Jae Hak
,
Process Development Division, Quros. Co., Ltd., San 14-1, Chunghak-dong, Osan-si, Gyunggi-do 446-712
Published in
Applied physics letters
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Development of MURCC code for the efficient multi-unit level 3 probabilistic safety assessment
by
Jung, Woo Sik
,
Lee, Hye Rin
,
Kim, Jae-Ryang
,
Lee, Gee Man
Published in
Nuclear engineering and technology
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Development of MURCC code for the efficient multi-unit level 3 probabilistic safety assessment
by
Jung, Woo Sik
,
Lee, Hye Rin
,
Kim, Jae-Ryang
,
Lee, Gee Man
Published in
Nuclear engineering and technology
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Applied Physics Letters
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Nuclear Engineering And Technology
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Aging
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Air
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Multi-Unit Level 3 Probabilistic Safety Assessment
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Multiple Location Method
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