Search Results - Kim, Gwanjoong

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  1. 1
    Analysis of electron thermal properties in Ar/O2 inductively coupled plasmas: A global model simulation using Langmuir probe data

    Analysis of electron thermal properties in Ar/O2 inductively coupled plasmas: A global model simulation using Langmuir probe data by Seo, Hwiwon, Lee, Haneul, Kwon, Ji-Won, Kim, Gwanjoong, Lee, Ingyu, Kim, Gon-Ho

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  2. 2
    Application of Plasma Information-Based Virtual Metrology (PI-VM) for Etching in C₄F₈/Ar/O₂ Plasma

    Application of Plasma Information-Based Virtual Metrology (PI-VM) for Etching in C₄F₈/Ar/O₂ Plasma by Kim, Gwanjoong, Kwon, Ji-Won, Lee, Ingyu, Seo, Hwiwon, Park, Jong-Bae, Shin, Jong-Hyeon, Kim, Gon-Ho

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