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Remote plasma enhanced atomic layer deposition of titanium nitride film using metal organic precursor (C12H23N3Ti) and N2 plasma
by
Kim, Byunguk
,
Lee, Namgue
,
Lee, Junghoon
,
Park, Taehun
,
Park, Hyunwoo
,
Kim, Youngjoon
,
Jin, Changhyun
,
Lee, Dahyun
,
Kim, Hohoon
,
Jeon, Hyeongtag
Published in
Applied surface science
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Atomic layer deposition of titanium dioxide films using a metal organic precursor (C12H23N3Ti) and H2O (DI water)
by
Kim, Byunguk
,
Lee, Namgue
,
Park, Suhyeon
,
Park, Taehun
,
Song, Jaiwon
,
Han, Seungwook
,
Park, Hyunwoo
,
Lee, Dahyun
,
Kim, Hohoon
,
Jeon, Hyeongtag
Published in
Journal of alloys and compounds
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Corrigendum to “Atomic layer deposition of titanium dioxide films using a metal organic precursor (C12H23N3Ti) and H2O (DI water)” [J. Alloy. Compd. 857 (2021) 157931]
by
Kim, Byunguk
,
Lee, Namgue
,
Park, Suhyeon
,
Park, Taehun
,
Song, Jaiwon
,
Han, Seungwook
,
Park, Hyunwoo
,
Lee, Dahyun
,
Kim, Hohoon
,
Jeon, Hyeongtag
Published in
Journal of alloys and compounds
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Surface reaction of the hafnium precursor with a linked amido-cyclopentadienyl ligand: A density functional theory study
by
Hidayat, Romel
,
Kim, Hye-Lee
,
Kim, Hohoon
,
Byun, Younghun
,
Lee, Jongsoo
,
Lee, Won-Jun
Published in
Journal of vacuum science & technology. A, Vacuum, surfaces, and films
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Plasma-enhanced atomic layer deposited HfO2 films using a novel heteroleptic cyclopentadienyl-based Hf precursor
by
Baek, Ji-hoon
,
Choi, Wan-ho
,
Kim, Hohoon
,
Cheon, Seonghak
,
Byun, Younghun
,
Jeon, Woojin
,
Park, Jin-Seong
Published in
Ceramics international
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Journal Of Alloys And Compounds
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Applied Surface Science
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Ceramics International
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Materials Science
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Metal Organic Precursor
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2Nme)Hf2
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Anatase
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Atomic Layer Deposition
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Atomic Layer Epitaxy
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Chemistry
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Deionization
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Materials Science, Ceramics
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Sciencedirect Journals
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Sciencedirect: Materials Science Backfile
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Science Citation Index Expanded (Web Of Science)
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American Institute Of Physics:jisc Collections:transitional Journals Agreement 2021-23 (Reading List)
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Aip 美国物理联合会期刊回溯(Nstl购买)
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Aip - American Institute Of Physics
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Sciencedirect: Physics General Backfile
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