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    Wafer Level Vacuum Packaged Out-of-Plane and In-Plane Differential Resonant Silicon Accelerometers for Navigational Applications

    Wafer Level Vacuum Packaged Out-of-Plane and In-Plane Differential Resonant Silicon Accelerometers for Navigational Applications by Kim, Illh-Wan, Seok, Seon-Ho, Kim, Hyeon-Cheol, Kang, Moon-Koo, Chun, Kuk-Jin

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