Formation of out-of-plane film micro arch by methods of technological control of internal stress by Enns, Y., Kleimanov, R.

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LK-5 glass surface modification by glass blowing method based on microsystem technology by Dzhinikashvili, A, Enns, Y, Kleimanov, R, Kazakin, A

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Analysis of the possibility of creating an acoustic velocity sensor using GaN epitaxial films by Enns, Y, Kazakin, A, Akulshin, Y, Mizerov, A, Kleimanov, R

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Microfabrication of Alkali Vapor MEMS Cells for chip-scale atomic clock by Kazakin, A, Kleimanov, R, Komarevtsev, I, Kondrateva, A, Enns, Y, Shashkin, A, Glukhovskoy, A

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Electromechanical bending microactuator as optical shutter by Kleimanov, R., Enns, Y., Pyatishev, E., Komarevtsev, I.

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Investigation of the piezoresistive properties and temperature coefficient of resistance of epitaxial GaN layers for applications in MEMS and thermal flow sensors by Kazakin, A, Enns, Y, Mizerov, A, Kleimanov, R, Bouravleuv, A

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Lithium aluminosilicate glass-ceramics for low-temperature anodic sealing of MEMS sensors by Kleimanov, R, Komarevtsev, I, Enns, Y, Akulshin, Y, Korshunov, A, Shashkin, A, Arefiev, D, Kazakin, A

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Electrooptical Properties of TiO2 Doped with Gold Nanoparticles by Kondrateva, A., Enns, Ya, Kazakin, A., Kleimanov, R., Morozov, I., Karaseov, P., Mishin, M.

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The development of a bistable microdrive for the micromechanical gyroscopes by Enns, Y B, Kleimanov, R V, Kazakin, A N, Pyatishev, E N, Кorshunov, A V

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Electrooptical Properties of TiO.sub.2 Doped with Gold Nanoparticles by Kondrateva, A, Enns, Ya, Kazakin, A, Kleimanov, R, Morozov, I, Karaseov, P, Mishin, M

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