Search Results - Klimecky, Pete

  • Showing 1 - 5 results of 5
Refine Results
  1. 1
    Compensation for transient chamber wall condition using real-time plasma density feedback control in an inductively coupled plasma etcher

    Compensation for transient chamber wall condition using real-time plasma density feedback control in an inductively coupled plasma etcher by Klimecky, Pete I., Grizzle, J. W., Terry, Fred L.

    Get full text
    Items that this one cites
    Items that cite this one
    Article
    Save to List
    Saved in:
  2. 2
    In situ measurements of HCl during plasma etching of poly-silicon using a diode laser absorption sensor

    In situ measurements of HCl during plasma etching of poly-silicon using a diode laser absorption sensor by Kim, Suhong, Klimecky, Pete, Jeffries, Jay B, Jr, Fred L Terry, Hanson, Ronald K

    Get full text
    Items that this one cites
    Items that cite this one
    Article
    Save to List
    Saved in:
  3. 3
    Real-time reactive ion etch metrology techniques to enable in situ response surface process characterization

    Real-time reactive ion etch metrology techniques to enable in situ response surface process characterization by KLIMECKY, Pete, GARVIN, Craig, GALARZA, Cecilia G, STUTZMAN, Brooke S, KHARGONEKAR, Pramod P, TERRY, Fred L

    Get full text
    Items that this one cites
    Items that cite this one
    Article
    Save to List
    Saved in:
  4. 4
    In-situ spectroscopic reflectometry for polycrystalline silicon thin film etch rate determination during reactive ion etching

    In-situ spectroscopic reflectometry for polycrystalline silicon thin film etch rate determination during reactive ion etching by BENSON, T. E, KAMLET, L. I, KLIMECKY, P, TERRY, F. L

    Get full text
    Article
    Save to List
    Saved in:
  5. 5
    In-situ spectroscopic reflectometry for polycrystalline silicon thin film etch rate determination during reactive ion etchinc

    In-situ spectroscopic reflectometry for polycrystalline silicon thin film etch rate determination during reactive ion etchinc by Benson, Tyrone E., Kamlet, Leonard I., Klimecky, Pete, Terry, Fred L.

    Get full text
    Items that this one cites
    Items that cite this one
    Article
    Save to List
    Saved in:

Search Tools: