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Modeling of the long-range interstitial migration of ion implanted boron
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Velichko, O.I.
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Kniazhava, N.V.
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Computational materials science
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Simulation of boron diffusion during low-temperature annealing of implanted silicon
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Velichko, O. I.
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Kavaliova, A. P.
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Applied physics. A, Materials science & processing
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