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A study of electron energy distributions in an inductively coupled plasma by laser Thomson scattering
by
Hori, T.
,
Kogano, M.
,
Bowden, M. D.
,
Uchino, K.
,
Muraoka, K.
Published in
Journal of applied physics
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Comparison of electron property measurements in an inductively coupled plasma made by Langmuir probe and laser Thomson scattering techniques
by
Bowden, M. D.
,
Kogano, M.
,
Suetome, Y.
,
Hori, T.
,
Uchino, K.
,
Muraoka, K.
Published in
Journal of vacuum science & technology. A, Vacuum, surfaces, and films
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Journal Of Applied Physics
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Journal Of Vacuum Science & Technology A: Vacuum, Surfaces, And Films
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Journal Of Vacuum Science & Technology. A, Vacuum, Surfaces, And Films
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Materials Science, Coatings & Films
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Surfaces, Coatings And Films
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American Institute Of Physics:jisc Collections:transitional Journals Agreement 2021-23 (Reading List)
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