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Internal stresses in ta-C films deposited by pulse arc discharge method
by
Inkin, V.N.
,
Kirpilenko, G.G.
,
Kolpakov, A.J.
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Diamond and related materials
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Properties of aluminium nitride coating obtained by vacuum arc discharge method with plasma flow separation
by
Inkin, V.N
,
Kirpilenko, G.G
,
Kolpakov, A.J
Published in
Diamond and related materials
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Diamond-Like Carbon
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Filtered Cathodic Vacuum Arc
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