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Self-termination of contactless photo-electrochemical (PEC) etching on aluminum gallium nitride/gallium nitride heterostructures by Miwa, Kazuki, Komatsu, Yuto, Toguchi, Masachika, Horikiri, Fumimasa, Fukuhara, Noboru, Narita, Yoshinobu, Ichikawa, Osamu, Isono, Ryota, Tanaka, Takeshi, Sato, Taketomo

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