Search Results - Kopalidis, P.

  • Showing 1 - 11 results of 11
Refine Results
  1. 1
    Characterization and residue elimination of hot aluminum etching in a transformer coupled plasma etcher

    Characterization and residue elimination of hot aluminum etching in a transformer coupled plasma etcher by KOPALIDIS, P. M, VERTOMMEN, J, BADENES, G

    Get full text
    Items that cite this one
    Article
    Save to List
    Saved in:
  2. 2
    Modeling and experimental studies of a reactive ion etcher using SF6/O2 chemistry

    Modeling and experimental studies of a reactive ion etcher using SF6/O2 chemistry by KOPALIDIS, P. M, JORNE, J

    Get full text
    Article
    Save to List
    Saved in:
  3. 3
    Low-Energy Ion Implantation Using the Arsenic Dimer Ion: Process Characterization and Throughput Improvement

    Low-Energy Ion Implantation Using the Arsenic Dimer Ion: Process Characterization and Throughput Improvement by Kopalidis, Peter, Freer, Brian S, Rathmell, Mark

    Get full text
    Items that this one cites
    Article
    Save to List
    Saved in:
  4. 4
    Langmuir probe measurements and characterization of silicon etching in SF6/O2 discharges

    Langmuir probe measurements and characterization of silicon etching in SF6/O2 discharges by KOPALIDIS, P. M, JORNE, J

    Get full text
    Article
    Save to List
    Saved in:
  5. 5
    Thermally induced structural relaxation in amorphous rare-earth-transition metal thin films

    Thermally induced structural relaxation in amorphous rare-earth-transition metal thin films by BARTHOLOMEUSZ, B. J, KOPALIDIS, P. M, STINSON, D. G

    Get full text
    Items that this one cites
    Items that cite this one
    Article
    Save to List
    Saved in:
  6. 6
    Dopant Distribution during Low Energy Implant Anneal Due to Photoresist Breakdown and Anneal Ambient Effects

    Dopant Distribution during Low Energy Implant Anneal Due to Photoresist Breakdown and Anneal Ambient Effects by Kopalidis, Peter M., Kondratenko, Serguei

    Get full text
    Items that this one cites
    Items that cite this one
    Article
    Save to List
    Saved in:
  7. 7
    Characterization of a Xenon plasma electron flood gun on a GSD-200E/sup 2/ high current implanter using Q/sub BD/, FLASH, SPIDER, and CHARM/sup TM/-2 wafers

    Characterization of a Xenon plasma electron flood gun on a GSD-200E/sup 2/ high current implanter using Q/sub BD/, FLASH, SPIDER, and CHARM/sup TM/-2 wafers by Kopalidis, P., Erokhin, Y., Santiesteban, R., Soncini, V.

    Request full text
    Conference Proceeding
    Save to List
    Saved in:
  8. 8
    Low energy implant throughput improvement by using the Arsenic dimer ion (As2+) on the Axcelis GSDIII/LED ion implanter

    Low energy implant throughput improvement by using the Arsenic dimer ion (As2+) on the Axcelis GSDIII/LED ion implanter by Kopalidis, P., Sohl, C., Freer, B.S., Arneen, M., Reece, R., Rathmell, M.

    Request full text
    Conference Proceeding
    Save to List
    Saved in:
  9. 9
    Precision halo control with antimony and indium on Axcelis medium current ion implanters

    Precision halo control with antimony and indium on Axcelis medium current ion implanters by Luckman, G., Harris, M., Rathmell, R.D., Kopalidis, P., Ray, A.M., Sato, F., Sano, M.

    Request full text
    Conference Proceeding
    Save to List
    Saved in:
  10. 10
    Process performance for Virtual Slot Disk/Triple Surface Disk Faraday on a multi-wafer high current ion implantation system

    Process performance for Virtual Slot Disk/Triple Surface Disk Faraday on a multi-wafer high current ion implantation system by Lee, H., Mikkilineni, S., Knerr, R., Harris, M.A., Chow, J., Kopalidis, P., Ameen, M.S.

    Request full text
    Conference Proceeding
    Save to List
    Saved in:
  11. 11
    Performance of a new silicon-coated disk material: disk manufacturing control and device production experience

    Performance of a new silicon-coated disk material: disk manufacturing control and device production experience by Stone, L., Becker, R., Gerghty, R., Stone, D., Kopalidis, P., Justesen, P., Bratschun, A.

    Request full text
    Conference Proceeding
    Save to List
    Saved in:

Search Tools: