Search Results - Kouge, Kouichiro

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  1. 1
    Observation of plasma inflows in laser-produced Sn plasma and their contribution to extreme-ultraviolet light output enhancement

    Observation of plasma inflows in laser-produced Sn plasma and their contribution to extreme-ultraviolet light output enhancement by Tomita, Kentaro, Pan, Yiming, Sunahara, Atsushi, Kouge, Kouichiro, Mizoguchi, Hakaru, Nishihara, Katsunobu

    Published in Scientific reports
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  2. 2
    Time-resolved two-dimensional profiles of electron density and temperature of laser-produced tin plasmas for extreme-ultraviolet lithography light sources

    Time-resolved two-dimensional profiles of electron density and temperature of laser-produced tin plasmas for extreme-ultraviolet lithography light sources by Tomita, Kentaro, Sato, Yuta, Tsukiyama, Syouichi, Eguchi, Toshiaki, Uchino, Kiichiro, Kouge, Kouichiro, Tomuro, Hiroaki, Yanagida, Tatsuya, Wada, Yasunori, Kunishima, Masahito, Soumagne, Georg, Kodama, Takeshi, Mizoguchi, Hakaru, Sunahara, Atsushi, Nishihara, Katsunobu

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  3. 3
    Correlation between laser absorption and radiation conversion efficiency in laser produced tin plasma

    Correlation between laser absorption and radiation conversion efficiency in laser produced tin plasma by Matsukuma, Hiraku, Sunahara, Atsushi, Yanagida, Tatsuya, Tomuro, Hiroaki, Kouge, Kouichiro, Kodama, Takeshi, Hosoda, Tatsuya, Fujioka, Shinsuke, Nishimura, Hiroaki

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  4. 4
    Feasibility study on reactive ion etching occurrence in EUV-induced photoionized hydrogen plasmas based on electron temperature and electron density measurements

    Feasibility study on reactive ion etching occurrence in EUV-induced photoionized hydrogen plasmas based on electron temperature and electron density measurements by Kouge, Kouichiro, Tomita, Kentaro, Hotta, Junya, Pan, Yiming, Tomuro, Hiroaki, Yanagida, Tatsuya, Uchino, Kiichiro, Yamamoto, Naoji

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  5. 5
    Time-resolved spatial profiles of electron density and temperature in hydrogen plasmas induced by radiation from laser-produced tin plasmas for extreme ultraviolet lithography light sources

    Time-resolved spatial profiles of electron density and temperature in hydrogen plasmas induced by radiation from laser-produced tin plasmas for extreme ultraviolet lithography ligh... by Kouge, Kouichiro, Tomita, Kentaro, Hotta, Junya, Pan, Yiming, Tomuro, Hiroaki, Morita, Masayuki, Yanagida, Tatsuya, Uchino, Kiichiro, Yamamoto, Naoji

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  6. 6
    Update of Development Progress of the High Power LPP-EUV Light Source Using a Magnetic Field

    Update of Development Progress of the High Power LPP-EUV Light Source Using a Magnetic Field by Kouge, Kouichiro, Nagai, Shinji, Hori, Tsukasa, Ueno, Yoshifumi, Yanagida, Tatsuya, Miyao, Kenichi, Hayashi, Hideyuki, Watanabe, Yukio, Abe, Tamotsu, Nakarai, Hiroaki, Saito, Takashi, Mizoguchi, Hakaru

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  7. 7
    Spatial profiles of electron density, electron temperature, average ionic charge, and EUV emission of laser-produced Sn plasmas for EUV lithography

    Spatial profiles of electron density, electron temperature, average ionic charge, and EUV emission of laser-produced Sn plasmas for EUV lithography by Sato, Yuta, Tomita, Kentaro, Tsukiyama, Syoichi, Eguchi, Toshiaki, Uchino, Kiichiro, Kouge, Kouichiro, Tomuro, Hiroaki, Yanagida, Tatsuya, Wada, Yasunori, Kunishima, Masahito, Kodama, Takeshi, Mizoguchi, Hakaru

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